2026 Global New Product Launch
Independently developed domestic 172nm EUV vacuum ultraviolet light source series officially launched!
Based on years of R&D accumulation in high-end light source technology, we have officially launched a new generation of 172nm EUV vacuum ultraviolet high-power light source products. It builds a diversified power model matrix, balances customized demands and stable performance, and fully covers core process demands in semiconductors, precision optics, high-end electronic manufacturing and other fields. Empowering the upgrading of the high-end manufacturing industry with solid technical strength, it delivers efficient, stable and production-line compatible light source solutions for customers.
1. Core Product Specifications
2. Core Product Advantages
1. Full power range coverage with customized adaptation
Four standard models including 300W, 500W, 800W and 1000W are available. The emission length can be flexibly customized according to customers' production lines and process requirements, perfectly matching production processes in different scenarios and of different scales.
2. Stable illuminance output
All models deliver stable illuminance of 100~200mW/cm² with outstanding light uniformity, ensuring consistent processing effects and effectively improving product yield.
3. Long service life
It supports stable full-power operation for 1500 to 2000 hours, reducing equipment replacement frequency and cutting customers' production and operation costs.
4. Dual optional cooling systems
Air cooling and water cooling are both optional. Air cooling is energy-saving and convenient for low-load scenarios, while water cooling provides efficient heat dissipation for long-term high-power operation, ensuring continuous and stable equipment operation.
5. Leading industrial technology
Adopting advanced vacuum ultraviolet light source technology, it realizes non-contact dry treatment with zero chemical residue, fully meeting the damage-free and pollution-free process standards of high-end precision manufacturing.
3. Core Industry Applications
1. Semiconductor Manufacturing
Widely applied in wafer photocleaning, photoresist residue removal, Chiplet advanced packaging, wafer surface modification and other processes. With atomic-level cleaning capability, it greatly boosts the yield of semiconductor manufacturing processes, adapts to 7–28nm advanced semiconductor processes, and supports mass production of high-end semiconductor components.
2. Precision Optical Devices
Suitable for diffractive waveguide processing of AR/VR devices, surface cleaning of optical lenses and photomasks, as well as hydrophilic and hydrophobic modification of optical components. It enables nondestructive processing, and improves the precision, light transmittance and service life of optical products.
3. High-End Electronics & MEMS
Compatible with flexible circuit processing, MEMS microstructure treatment, biochip preparation and other scenarios. The low-temperature working mode avoids damage to flexible substrates and precision components, satisfying the miniaturization and high-precision production demands of high-end electronic products.
4. Advanced Manufacturing Industry
Extensively used in photovoltaic glass surface modification, coating pretreatment of high-end ceramics, photosensitive resin curing for 3D printing, and surface cleaning of precision medical devices. It optimizes material surface properties and comprehensively improves processing quality and production efficiency.
4. Product Value
The newly launched full-series 172nm EUV light source fills the market gap of domestic high-end vacuum ultraviolet light sources and breaks overseas technical barriers through diversified models and customized services.
It is applicable to both laboratory R&D and small-batch trial production, as well as large-scale industrial mass production lines. It helps enterprises optimize production processes, control comprehensive costs, strengthen core market competitiveness, and drive technological innovation and high-quality development of domestic high-end manufacturing industry.
