Excimer lamps, as a highly efficient UV light source based on excimer gas discharge technology, have demonstrated significant application value in recent years in the industrial, medical, and environmental fields. Their operating principle is to excite a mixture of specific inert gases (such as xenon and krypton) and halogen or rare gases through a high-voltage electric field, generating UV radiation with a precise wavelength. These ultraviolet radiation offers significant advantages, including excellent monochromaticity, concentrated energy, and a mercury-free environment.
From an industry perspective, the global demand for efficient and environmentally friendly light sources has driven the rapid development of excimer lamp technology. Traditional UV light sources (such as mercury lamps) face strict environmental regulations due to their mercury content. The entry into force of the Minamata Convention has accelerated the replacement of mercury-free UV technology. Excimer lamps, with their mercury-free and low energy consumption, have become an ideal alternative. Furthermore, the demand for refined processes in semiconductor manufacturing, surface treatment, sterilization, and disinfection has also led to the widespread application of excimer lamps in applications such as material modification, photoresist curing, and virus inactivation.
The significance of this industry lies primarily in three aspects: First, environmental value. The mercury-free nature of excimer lamps aligns with global sustainable development trends and reduces harmful emissions. Second, technological innovation. Their high-precision UV output has driven advancements in precision manufacturing and medical sterilization technologies. For example, during the COVID-19 pandemic, excimer UV disinfection equipment has garnered attention for its highly effective inactivation capabilities. Third, economic potential. As the industry chain matures, the application of excimer lamps in emerging fields such as new energy and biotechnology will further unlock market potential.
In the future, driven by breakthroughs in materials science and electronics technology, excimer lamps are expected to continue to develop towards higher efficiency and lower costs, becoming a key pillar of the global green light source industry.
